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Material design problems of plasma-chemical reactors for disposal perfluorinated compounds
Brožek, Vlastimil ; Březina, Václav ; Mastný, L. ; Kubatík, Tomáš František ; Živný, Oldřich
Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures ranging\nfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured
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Preparation of spheroidized and nano-structural spinels by the SPPS method
Brožek, Vlastimil ; Lukáč, František ; Medřický, Jan ; Mušálek, Radek ; Mašláni, Alan ; Mastný, L. ; Brodil, R.
Solution Precursor Plasma Spraying (SPPS) method, using hybrid water-stabilised plasma torch (WSP®-H), is presented in this study. Precursor, in a form of a solution of inorganic salts, is injected into the plasma jet, where the temperature can reach up to 25 000 K and a series of reactions lead to the formation of spherical sub-micrometric sized particles. The complete process of evaporating the liquid, crystallization, thermic decomposition, melting and recrystallization takes place in few milliseconds before the particles solidify. Melted nanoparticles can be either directly collected in order to obtain ultrafine powders or deposited onto a substrate to form micro-splats and continuous polycrystalline, and often partially amorphous, coatings. The possibility of continuous and discontinuous changes of stoichiometric composition in tetrahedral and octahedral configurations were analysed for the deposits of MgAl2O4, CoAl2O4 and CoFe2O4 spinels. Furthermore, thin colourful coatings of ruby and modified cobalt oxides were deposited onto ceramic and metallic substrates.
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